T80/T81 High and low temperature vacuum probe station

T80/T81 High and low temperature vacuum probe station

Introduction:

It can be tested at high and low temperature (4.2k-500k) in vacuum environment. It can be upgraded to load magnetic field and low temperature radiation screen design. The sample stand is made of high purity oxygen free copper, and the temperature uniformity is better. The temperature sensor adopts PT100 with good stability and repeatability or calibrated silicon diode as the temperature measuring device, which supports the optical fiber spectral characteristic test, Compatible with high magnification metallographic microscope, it can fine tune the movement, high frequency characteristics of the device (support the highest 67ghz frequency), probe heat sink design, light intensity / wavelength test of ld/led/pd, automatic flow control, iv/cv characteristic test of materials / devices, etc.

Parameter:

Model	T81-50Probe table	T80-50Probe table
Refrigeration mode	Liquid helium / liquid nitrogen refrigeration	Closed cycle refrigerator
Cavity material	Non magnetic stainless steel or aluminum alloy
temperature range	4.2k-450k	5k-450k
Cooling time	40min	About 150min
Flatness of sample table	≤7μm
Magnification	16~100X/20~ 4000X
Power demand	220V 50-60Hz

Note:

※The maximum need to measure a few inches of wafers or devices! Do you need to test fragments or single chips! The smallest single chip size!

※How high is the mechanical precision requirement of the probe station!

※Point to measure the electrode size of the sample! 100μm *100μm or 60μm *60μm pad, or mini pad made by FIB, or metal circuit inside ic!

※At most, several probes are needed to measure at the same time!

※Whether the probe card test will be used!

※How much do you need to use the minimum resolution of an optical microscope!

※For the microscope, do you need to add a polarizer for LC liquid crystal hot spot detection!

※During the probe point measurement, whether the current requirement reaches 100fa or below! Low

Is the capacitance requirement to be 0.1pf! Is there RF demand!

※What are the test instrument interfaces connected!

※Whether heating or cooling is needed when testing the environment! Do you need to seal the cavity!

※How about the leakage requirements of chuck! Do you need to add low impedance chuck!

※Do you need a shockproof table!

※If an anti-vibration table is added, is there compressed air